Please use this identifier to cite or link to this item: https://doi.org/10.1186/1556-276X-7-544
Title: Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage
Authors: Li, L.-J.
Zhu, B.
Ding, S.-J.
Lu, H.-L.
Sun, Q.-Q.
Jiang, A.
Zhang, D.W.
Zhu, C. 
Keywords: AAO
Capacitance density
Energy storage
Nanocapacitor arrays
RC time constant
Issue Date: 2012
Source: Li, L.-J., Zhu, B., Ding, S.-J., Lu, H.-L., Sun, Q.-Q., Jiang, A., Zhang, D.W., Zhu, C. (2012). Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage. Nanoscale Research Letters 7 : 1-12. ScholarBank@NUS Repository. https://doi.org/10.1186/1556-276X-7-544
Abstract: High density three-dimensional AZO/Al2O3/AZO nanocapacitor arrays have been fabricated for energy storage applications. Using atomic layer deposition technique, the stack of AZO/Al2O3/AZO has been grown in the porous anodic alumina template which is directly formed on the Si substrate. The fabricated capacitor shows a high capacitance density of 15.3 fF/μm2 at 100 kHz, which is nearly 2.5 times over the planar capacitor under identical conditions in theory. Further, the charge-discharge characteristics of the capacitor are characterized, indicating that the resistance-capacitance time constants are equal to 300 ns for the charging and discharging processes, and have no dependence on the voltage supply. This reflects good power characteristics of the electrostatic capacitor. © 2012 Li et al.
Source Title: Nanoscale Research Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/83204
ISSN: 19317573
DOI: 10.1186/1556-276X-7-544
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

6
checked on Mar 13, 2018

WEB OF SCIENCETM
Citations

7
checked on Mar 13, 2018

Page view(s)

14
checked on Mar 11, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.