Please use this identifier to cite or link to this item: https://doi.org/10.1021/nl802129f
Title: Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching
Authors: Choi, W.K. 
Liew, T.H. 
Dawood, M.K.
Smith, H.I.
Thompson, C.V.
Hong, M.H. 
Issue Date: Nov-2008
Citation: Choi, W.K., Liew, T.H., Dawood, M.K., Smith, H.I., Thompson, C.V., Hong, M.H. (2008-11). Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching. Nano Letters 8 (11) : 3799-3802. ScholarBank@NUS Repository. https://doi.org/10.1021/nl802129f
Abstract: We report results on the synthesis of silicon nanostructures that were fabricated using a combination of interference lithography and catalytic etching. With this technique, we were able to create nanostructures that are perfectly periodic over very large areas (1 cm 2 or more), where the cross-sectional shapes and the array ordering can be varied. Furthermore this technique can readily and independently control the sizes and spacings of the nanostructures down to spacings of 200 nm or less. These characteristics cannot be achieved using other known techniques. © 2008 American Chemical Society.
Source Title: Nano Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/83142
ISSN: 15306984
DOI: 10.1021/nl802129f
Appears in Collections:Staff Publications

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