Please use this identifier to cite or link to this item:
|Title:||Phase change liner stressor for strain engineering of P-channel FinFETs|
|Citation:||Ding, Y., Cheng, R., Koh, S.-M., Liu, B., Yeo, Y.-C. (2013). Phase change liner stressor for strain engineering of P-channel FinFETs. IEEE Transactions on Electron Devices 60 (9) : 2703-2711. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2013.2271643|
|Abstract:||A novel Ge2Sb2Te5 (GST) liner stressor for enhancing the drive current in p-channel FinFETs (p-FinFETs) is demonstrated. When amorphous GST changes phase to crystalline GST (c-GST), the GST material contracts. This phenomenon is exploited for strain engineering of p-FinFETs. A GST liner stressor wrapping a p-FinFET can be shrunk or contracted to generate very high channel stress for drive current enhancement. Saturation drain current enhancement of ~80% and linear drain current enhancement of ~110% are observed for FinFETs with c-GST liner stressor over the control or unstrained FinFETs. The drain current enhancement is higher for 0° rotated FinFETs as compared with that of the FinFETs with 45° rotation, due to the orientation-dependent piezoresistance coefficients. The drain current enhancement increases with decreasing gate length. GST liner stressor could be a strain engineering option in sub-20-nm technology nodes. © 1963-2012 IEEE.|
|Source Title:||IEEE Transactions on Electron Devices|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 18, 2019
WEB OF SCIENCETM
checked on Feb 11, 2019
checked on Feb 8, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.