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https://doi.org/10.1088/0960-1317/22/5/055012
Title: | Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements | Authors: | Lou, L. Zhang, S. Park, W.-T. Tsai, J.M. Kwong, D.-L. Lee, C. |
Issue Date: | May-2012 | Citation: | Lou, L., Zhang, S., Park, W.-T., Tsai, J.M., Kwong, D.-L., Lee, C. (2012-05). Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements. Journal of Micromechanics and Microengineering 22 (5) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/5/055012 | Abstract: | A pressure sensor with a 200 μm diaphragm using silicon nanowires (SiNWs) as a piezoresistive sensing element is developed and optimized. The SiNWs are embedded in a multilayered diaphragm structure comprising silicon nitride (SiN x) and silicon oxide (SiO 2). Optimizations were performed on both SiNWs and the diaphragm structure. The diaphragm with a 1.2 μm SiN x layer is considered to be an optimized design in terms of small initial central deflection (0.1 μm), relatively high sensitivity (0.6% psi 1) and good linearity within our measurement range. © 2012 IOP Publishing Ltd. | Source Title: | Journal of Micromechanics and Microengineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/82845 | ISSN: | 09601317 | DOI: | 10.1088/0960-1317/22/5/055012 |
Appears in Collections: | Staff Publications |
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