Please use this identifier to cite or link to this item: https://doi.org/10.1109/LPT.2006.873959
Title: MOEMS variable optical attenuators using rotary comb drive actuators
Authors: Yeh, J.A.
Jiang, S.-S.
Lee, C. 
Keywords: Microoptoelectromechanical systems (MOEMS)
Rotary comb drive
Variable optical attenuators (VOAs)
Issue Date: 15-May-2006
Citation: Yeh, J.A., Jiang, S.-S., Lee, C. (2006-05-15). MOEMS variable optical attenuators using rotary comb drive actuators. IEEE Photonics Technology Letters 18 (10) : 1170-1172. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2006.873959
Abstract: We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2 × 4.7 mm2 only. © 2006 IEEE.
Source Title: IEEE Photonics Technology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/82718
ISSN: 10411135
DOI: 10.1109/LPT.2006.873959
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