Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/22/12/125020
Title: Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes
Authors: Liu, H.
Soon, B.W.
Wang, N.
Tay, C.J. 
Quan, C. 
Lee, C. 
Issue Date: Dec-2012
Citation: Liu, H., Soon, B.W., Wang, N., Tay, C.J., Quan, C., Lee, C. (2012-12). Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes. Journal of Micromechanics and Microengineering 22 (12) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/12/125020
Abstract: A novel electromagnetic energy harvester (EH) with multiple vibration modes has been developed and characterized using three-dimensional (3D) excitation at different frequencies. The device consists of a movable circular-mass patterned with three sets of double-layer aluminum (Al) coils, a circular-ring system incorporating a magnet and a supporting beam. The 3D dynamic behavior and performance analysis of the device shows that the first vibration mode of 1285 Hz is an out-of-plane motion, while the second and third modes of 1470 and 1550 Hz, respectively, are in-plane at angles of 60° (240°) and 150° (330°) to the horizontal (x-) axis. For an excitation acceleration of 1 g, the maximum power density achieved are 0.444, 0.242 and 0.125 μW cm -3 at vibration modes of I, II and III, respectively. The experimental results are in good agreement with the simulation and indicate a good potential in the development of a 3D EH device. © 2012 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/82350
ISSN: 09601317
DOI: 10.1088/0960-1317/22/12/125020
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