Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.2382950
Title: Effects of SiO2/Si3N4 hard masks on etching properties of metal gates
Authors: Hwang, W.S.
Cho, B.-J. 
Chan, D.S.H. 
Bliznetsov, V.
Yoo, W.J.
Issue Date: 2006
Citation: Hwang, W.S., Cho, B.-J., Chan, D.S.H., Bliznetsov, V., Yoo, W.J. (2006). Effects of SiO2/Si3N4 hard masks on etching properties of metal gates. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 (6) : 2689-2694. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2382950
Abstract: Reduced etching rates of advanced metal gates (TaN, TiN, and HfN) using Si O2 Si3 N4 hard masks are observed in Cl2 plasma. Si and O released from hard masks react with metal surfaces newly exposed to the plasma during the etching, thereby forming metal oxides. The metal oxides formed on the etched surface retard the etch rates. The suppression of etch rates with hard mask is more obvious for TiN than for TaN and HfN, because Ti oxides are readily formed on the etched TiN surface due to their low Gibbs free energies of formation. The surface of TiN degrades with etching time with Si O2 mask, because etching rates of Si oxides and Ti oxides are different in the (Ti O2) 1-x (Si O2) x residues remaining on the etched surface. In contrast, a conventional poly-Si electrode does not show the mask effects on etch rates and surface roughness. © 2006 American Vacuum Society.
Source Title: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
URI: http://scholarbank.nus.edu.sg/handle/10635/82236
ISSN: 10711023
DOI: 10.1116/1.2382950
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