Please use this identifier to cite or link to this item: https://doi.org/10.1049/el:20092835
Title: Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
Authors: Khine, L.
Palaniapan, M. 
Issue Date: 2009
Citation: Khine, L., Palaniapan, M. (2009). Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators. Electronics Letters 45 (1) : 37-39. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20092835
Abstract: The performance of micromechanical Lamé-mode square resonator designs with different geometric parameter variations in structural layer thickness, length of anchor beams and the number of anchors placed at nodal points, is reported. Measured results reveal that there is an optimal range of anchor designs that provide high quality factor (Q) above one million, along with low motional resistance, Rm. Two-anchor-only support design is able to achieve very high Qs but results in higher motional resistance. Lower structural thickness generally reduces the quality factor Q and Rm owing to interference from out-of-plane modes. © 2009 The Institution of Engineering and Technology.
Source Title: Electronics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/82211
ISSN: 00135194
DOI: 10.1049/el:20092835
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