Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2011.2114634
Title: Chip-level thermoelectric power generators based on high-density silicon nanowire array prepared with top-down CMOS technology
Authors: Li, Y.
Buddharaju, K.
Singh, N.
Lo, G.Q.
Lee, S.J. 
Keywords: Energy harvesting
power
silicon nanowire
thermoelectric
Issue Date: May-2011
Citation: Li, Y., Buddharaju, K., Singh, N., Lo, G.Q., Lee, S.J. (2011-05). Chip-level thermoelectric power generators based on high-density silicon nanowire array prepared with top-down CMOS technology. IEEE Electron Device Letters 32 (5) : 674-676. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2011.2114634
Abstract: This letter, for the first time, reports a high-density silicon-nanowire (SiNW)-based thermoelectric generator (TEG) prepared by a top-down CMOS-compatible technique. The 5 mm × 5 mm TEG comprises of densely packed alternating n- and p-type SiNW bundles with each wire having a diameter of 80 nm and a height of 1 μm. Each bundle serving as an individual thermoelectric element, having 540 × 540 wires, was connected electrically in series and thermally in parallel. The fabricated TEG demonstrates thermoelectric power generation with an open circuit voltage (Voc) of 1.5 mV and a short circuit current (Isc) of 3.79 μA with an estimated temperature gradient across the device of 0.12 K. © 2011 IEEE.
Source Title: IEEE Electron Device Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/82054
ISSN: 07413106
DOI: 10.1109/LED.2011.2114634
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