Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2010.2076785
Title: A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
Authors: Koh, K.H.
Lee, C. 
Kobayashi, T.
Keywords: Microelectromechanical systems (MEMS)
mirror
optical microelectromechanical systems
piezoelectric actuator
PZT
variable optical attenuator
Issue Date: Dec-2010
Source: Koh, K.H., Lee, C., Kobayashi, T. (2010-12). A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects. Journal of Microelectromechanical Systems 19 (6) : 1370-1379. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2076785
Abstract: A gold-coated silicon mirror (5 mm × 5 mm) actuated by piezoelectric Pb (Zr,Ti) O3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with a 5-μ m-thick Si device layer, with multilayers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and 1 × 10 arrayed PZT cantilevers arranged in parallel are formed after the release process. The ten cantilevers are designed to be electrically isolated from one another. A dual-core fiber collimator is aligned perpendicularly to the mirror in a 3-D light attenuation arrangement. Thus, three modes of attenuation mechanisms were investigated based on rotational and translational effects. A dynamic attenuation range of 40 dB is achieved at 1 V and 1.8 V for bending and torsional mode, respectively. © 2010 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/81902
ISSN: 10577157
DOI: 10.1109/JMEMS.2010.2076785
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