Please use this identifier to cite or link to this item: https://doi.org/10.1007/s00542-012-1424-1
Title: A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
Authors: Liu, H.
Lee, C. 
Kobayashi, T.
Tay, C.J. 
Quan, C. 
Issue Date: Apr-2012
Source: Liu, H., Lee, C., Kobayashi, T., Tay, C.J., Quan, C. (2012-04). A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz. Microsystem Technologies 18 (4) : 497-506. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-012-1424-1
Abstract: In this paper, a new S-shaped piezoelectric PZT cantilever is microfabricated for scavenging vibration energy at low frequencies (
Source Title: Microsystem Technologies
URI: http://scholarbank.nus.edu.sg/handle/10635/81894
ISSN: 09467076
DOI: 10.1007/s00542-012-1424-1
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