Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/81768
Title: Studies of carbon nitride thin films synthesized by KrF excimer ablation of graphite in nitrogen atmosphere
Authors: Ren, Z.M.
Lu, Y.F. 
Song, W.D. 
Chan, D.S.H. 
Low, T.S. 
Gamani, K. 
Chen, G. 
Li, K.
Issue Date: 1998
Citation: Ren, Z.M.,Lu, Y.F.,Song, W.D.,Chan, D.S.H.,Low, T.S.,Gamani, K.,Chen, G.,Li, K. (1998). Studies of carbon nitride thin films synthesized by KrF excimer ablation of graphite in nitrogen atmosphere. Materials Research Society Symposium - Proceedings 526 : 343-348. ScholarBank@NUS Repository.
Abstract: Carbon nitride thin films were deposited on silicon wafers by pulsed KrF excimer laser (wavelength 248 nm, duration 23 ns) ablation of graphite in nitrogen atmosphere. Different fluences of the excimer laser and pressures of the nitrogen atmosphere were used in order to achieve a high nitrogen content in the deposited thin films. Fourier Transform Infra-red (FTIR) and X-ray photoelectron spectroscopy (XPS) were used to identify the binding structure and the content of the nitrogen species in the deposited thin films. The highest N/C ratio 0.42 was achieved at an excimer laser fluence of 0.8 Jcm-2 with a repetition rate of 10 Hz under the nitrogen pressure of PN = 100 mTorr. A high content of C-N double bond instead of C-N triple bond was indicated in the deposited thin films. Ellipsometry was used to analyze the optical properties of the deposited thin films. The carbon nitride thin films have amorphous-semiconductor-like characteristics with the optical band gap Eopt, as high as 0.42 eV.
Source Title: Materials Research Society Symposium - Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/81768
ISSN: 02729172
Appears in Collections:Staff Publications

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