Investigations on the morphology of silicon surfaces anisotropically etched with TMAH

Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0921-5107(99)00507-3

Title:	Investigations on the morphology of silicon surfaces anisotropically etched with TMAH
Authors:	Thong, J.T.L. Bai, Y. Luo, P. Choi, W.K.
Issue Date:	15-Mar-2000
Citation:	Thong, J.T.L., Bai, Y., Luo, P., Choi, W.K. (2000-03-15). Investigations on the morphology of silicon surfaces anisotropically etched with TMAH. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 (2) : 177-179. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(99)00507-3
Abstract:	The formation and transformation of hillocks during the anisotropic etching of (100) silicon are investigated. Hillocks start as pyramids and grow in size as the surface etches down. The main pyramid edges become bevelled in the process, and when the bevelling planes meet, 〈101〉 ledges are formed which propagate and transform the {111} faces to ones with a characteristic bow. Such bowed face hillocks appear to be quasi-stable and form the majority of the population of the hillocks observed.
Source Title:	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
URI:	http://scholarbank.nus.edu.sg/handle/10635/80640
ISSN:	09215107
DOI:	10.1016/S0921-5107(99)00507-3
Appears in Collections:	Staff Publications

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