Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0040-6090(02)00951-3
Title: Synthesis of vertically aligned carbon nanotubes films on silicon wafers by pyrolysis of ethylenediamine
Authors: De Zhang, W.
Wen, Y.
Li, J.
Xu, G.Q. 
Gan, L.M.
Keywords: Carbon nanotubes
Chemical vapor deposition
Nickel thin film
Vertical alignment
Issue Date: 20-Dec-2002
Citation: De Zhang, W., Wen, Y., Li, J., Xu, G.Q., Gan, L.M. (2002-12-20). Synthesis of vertically aligned carbon nanotubes films on silicon wafers by pyrolysis of ethylenediamine. Thin Solid Films 422 (1-2) : 120-125. ScholarBank@NUS Repository. https://doi.org/10.1016/S0040-6090(02)00951-3
Abstract: Well-aligned carbon nanotubes (CNTs) have been grown on nickel-deposited silicon wafers by thermal chemical vapor deposition (CVD) of ethylenediamine precursor. The CNTs are vertically aligned at high density over large areas on the silicon surface. The size and the density of the nanotubes were found to be dependent on the thickness of the Ni film. The length of the nanotube array can be controlled by varying the CVD time. High-resolution transmission electron microscopy analysis revealed that the CNTs present bamboo-like multi-walled structure. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Thin Solid Films
URI: http://scholarbank.nus.edu.sg/handle/10635/77191
ISSN: 00406090
DOI: 10.1016/S0040-6090(02)00951-3
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