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Title: Microelectromechanical fiber optical switches
Authors: Liu, A.Q.
Chollet, Franck
Asundi, A. 
Miao, Jianmin
Issue Date: 1999
Source: Liu, A.Q.,Chollet, Franck,Asundi, A.,Miao, Jianmin (1999). Microelectromechanical fiber optical switches. Proceedings of SPIE - The International Society for Optical Engineering 3897 : 380-387. ScholarBank@NUS Repository.
Abstract: This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating/mirror switch driven by electrostatic actuator for fiber-optic switching applications. It consists of two bounded silicon wafers. One input fibre with a hemispherical lens at its end and three photodetectors are fabricated on the upper wafer. A movable platform with two gratings and one mirror are fabricated on the lower wafer. When the movable platform is at a certain position, the input beam can be split into three beams by the gratings. Details of the grating switching design, theoretical analysis, fabrication and experimental results are presented in this paper.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277786X
Appears in Collections:Staff Publications

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