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|Title:||Defect measurement using structured light system|
|Authors:||Toh, Siew-Lok |
Asundi, Anand K.
|Source:||Toh, Siew-Lok,Low, W.K.,Tay, C.J.,Shang, H.M.,Asundi, Anand K. (1997). Defect measurement using structured light system. Proceedings of SPIE - The International Society for Optical Engineering 2921 : 529-534. ScholarBank@NUS Repository.|
|Abstract:||In this paper, a new digital speckle intensity correlation searching technique which is named as 'differential oriented search' is proposed. This method effectively makes use of the distribution characteristics of the correlation functions, which makes the calculating time be considerably reduced. Experimental results shows that, the method presented here is a kind of high speed, high accurate and practical correlation metrology.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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