Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/74662
Title: Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
Authors: Ganesh, B.
Karimi, I.A. 
Keywords: Batch
Photolithography
Scheduling
Steppers
Wafer fabrication
Issue Date: 2004
Source: Ganesh, B.,Karimi, I.A. (2004). Modeling and scheduling stepper operations in the photolithography process in wafer fabrication. AIChE Annual Meeting, Conference Proceedings : 7825-7826. ScholarBank@NUS Repository.
Abstract: The photolithography process, as a single stage, multi-product batch process with non-identical, parallel units, used in wafer fabrication is described. In the process, the wafer is exposed to a light source that passes through the reticle which holds the pattern of the circuitry for a particular layer with the use of steppers. A mathematical model has been developed to schedule the batches of integral lots using slot-based continuous-time representation. The model allows the scheduling of multiple slots of the same type of product/device in a single slot and hence is able to handle larger problems and hence solve faster.
Source Title: AIChE Annual Meeting, Conference Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/74662
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