Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/73923
Title: Test structures for new MEMS sensors and devices
Authors: Tay Eng Hock, F. 
Koon Hwee, T.
Issue Date: 2002
Source: Tay Eng Hock, F.,Koon Hwee, T. (2002). Test structures for new MEMS sensors and devices. Proceedings of SPIE - The International Society for Optical Engineering 4746 I : 504-513. ScholarBank@NUS Repository.
Abstract: In this paper, several testing methods such as Scanning Electron Microscope (SEM) measurement, capacitance-voltage testing, optical testing and electrical testing are proposed to characterize three different design microgyroscopes, which is based on their spring designs. They are fixed-fixed spring microgyroscope, folded spring microgyroscope, and fishhook spring microgyroscope. The proposed testing methods were proven reliable for characterizing the microgyroscope.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73923
ISSN: 0277786X
Appears in Collections:Staff Publications

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