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|Title:||Test structures for new MEMS sensors and devices|
|Authors:||Tay Eng Hock, F. |
Koon Hwee, T.
|Source:||Tay Eng Hock, F.,Koon Hwee, T. (2002). Test structures for new MEMS sensors and devices. Proceedings of SPIE - The International Society for Optical Engineering 4746 I : 504-513. ScholarBank@NUS Repository.|
|Abstract:||In this paper, several testing methods such as Scanning Electron Microscope (SEM) measurement, capacitance-voltage testing, optical testing and electrical testing are proposed to characterize three different design microgyroscopes, which is based on their spring designs. They are fixed-fixed spring microgyroscope, folded spring microgyroscope, and fishhook spring microgyroscope. The proposed testing methods were proven reliable for characterizing the microgyroscope.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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