Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2010.5672175
Title: Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Issue Date: 2010
Source: Du, Y.,Zhou, G.,Cheo, K.K.L.,Zhang, Q.,Feng, H.,Chau, F.S. (2010). Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 81-82. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672175
Abstract: This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant frequency tuning was achieved. The resonant frequency of one diffraction grating gradually dropped from 19870 Hz to 19588 Hz with its tuning voltages increased from 0V to 5V. Finally, synchronized laser scanning of multiple beams was demonstrated using stroboscopic method. ©2010 IEEE.
Source Title: 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/73902
ISBN: 9781424489251
DOI: 10.1109/OMEMS.2010.5672175
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