Please use this identifier to cite or link to this item: https://doi.org/10.1109/TRANSDUCERS.2011.5969811
Title: Nano-photonic displacement sensing mechanism
Authors: Yu, H. 
Zhou, G.
Chew, X.
Sinha, S.K. 
Chau, F.S.
Keywords: Displacement sensing
Waveguide
Issue Date: 2011
Source: Yu, H.,Zhou, G.,Chew, X.,Sinha, S.K.,Chau, F.S. (2011). Nano-photonic displacement sensing mechanism. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 1634-1637. ScholarBank@NUS Repository. https://doi.org/10.1109/TRANSDUCERS.2011.5969811
Abstract: A new displacement sensing mechanism, demonstrating excellent integration capability and easy operation, is presented. It works based on a broken transmission waveguide structure, in which light from the waveguide input is transmitted to the output end via a broken segment that has an initial offset to the main waveguide axis. This segment is directly connected to the movable component under test. As a result, any movement of this component will change the offset gap accordingly. Due to the highly sensitive response of the transmission with respect to the offset gap, the information about the movement as well as its variation can be obtained in real-time by detecting the output intensity from the waveguide. © 2011 IEEE.
Source Title: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
URI: http://scholarbank.nus.edu.sg/handle/10635/73671
ISBN: 9781457701573
DOI: 10.1109/TRANSDUCERS.2011.5969811
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