Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSORDEVICES.2010.12
Title: Development of a sensor for layered micro-component measurement using white light interferometry
Authors: Tay, C.J. 
Quan, C. 
Li, M.
Keywords: Layered structures
MEMS
Micro-gear
Sensor
White light interferometry
Issue Date: 2010
Source: Tay, C.J.,Quan, C.,Li, M. (2010). Development of a sensor for layered micro-component measurement using white light interferometry. Proceedings - 1st International Conference on Sensor Device Technologies and Applications, SENSORDEVICES 2010 : 21-24. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSORDEVICES.2010.12
Abstract: In this work, a white light interferometry technique has been developed for measuring the thickness of a multi-layer structure. Essentially, the method utilizes a white light source, which illuminates a test object mounted on a translation stage, using a modified Michelson interferometer configuration. Images of the object are recorded at certain prescribed vertical movements of the translation stage via a PZT. Tests are conducted on a dual layer semi-conductor wafer and a micro-gear. The results obtained show that the thickness and profile of a micro-gear fabricated from a polymer can be determined with good accuracy. © 2010 IEEE.
Source Title: Proceedings - 1st International Conference on Sensor Device Technologies and Applications, SENSORDEVICES 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/73340
ISBN: 9780769540948
DOI: 10.1109/SENSORDEVICES.2010.12
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