Please use this identifier to cite or link to this item: https://doi.org/10.1109/TRANSDUCERS.2011.5969466
Title: A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
Authors: Zhang, Q.X.
Du, Y. 
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.Q.
Kwong, D.L.
Keywords: Active alignment
Lens holder
Mechanical locking
MEMS
Packaging
Si-photonics
Issue Date: 2011
Source: Zhang, Q.X.,Du, Y.,Tan, C.W.,Zhang, J.,Yu, M.B.,Lo, G.Q.,Kwong, D.L. (2011). A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 1795-1798. ScholarBank@NUS Repository. https://doi.org/10.1109/TRANSDUCERS.2011.5969466
Abstract: This paper presents a novel MEMS configuration for three dimensional on-chip fine positioning and mechanical fixing of a ball lens. A MEMS lens holder, which consists of a suspended mass, is attached onto a MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2011 IEEE.
Source Title: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
URI: http://scholarbank.nus.edu.sg/handle/10635/73069
ISBN: 9781457701573
DOI: 10.1109/TRANSDUCERS.2011.5969466
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