Please use this identifier to cite or link to this item:
https://doi.org/10.1109/TRANSDUCERS.2011.5969466
| Title: | A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics | Authors: | Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L. |
Keywords: | Active alignment Lens holder Mechanical locking MEMS Packaging Si-photonics |
Issue Date: | 2011 | Citation: | Zhang, Q.X.,Du, Y.,Tan, C.W.,Zhang, J.,Yu, M.B.,Lo, G.Q.,Kwong, D.L. (2011). A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 1795-1798. ScholarBank@NUS Repository. https://doi.org/10.1109/TRANSDUCERS.2011.5969466 | Abstract: | This paper presents a novel MEMS configuration for three dimensional on-chip fine positioning and mechanical fixing of a ball lens. A MEMS lens holder, which consists of a suspended mass, is attached onto a MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2011 IEEE. | Source Title: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | URI: | http://scholarbank.nus.edu.sg/handle/10635/73069 | ISBN: | 9781457701573 | DOI: | 10.1109/TRANSDUCERS.2011.5969466 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.