Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/72543
Title: Construction and design of a high resolution portable scanning electron microscope column
Authors: Khursheed, Anjam 
Issue Date: 1999
Source: Khursheed, Anjam (1999). Construction and design of a high resolution portable scanning electron microscope column. Proceedings of SPIE - The International Society for Optical Engineering 3777 : 116-124. ScholarBank@NUS Repository.
Abstract: This paper presents Hall probe measurements on the recently proposed high resolution portable Scanning Electron Microscope (SEM) concept. A test column using permanent magnet lenses was constructed and has a height of 120 mm. Experimental axial flux density measurements were found to correlate well with simulation predictions. A method of varying the axial field strength by using magnetic shorting plates was investigated and found to be successful. In this way, the beam energy can be varied, and the portable permanent magnet column will be able to operate in a similar way to conventional SEMs.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/72543
ISSN: 0277786X
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

17
checked on Dec 16, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.