Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2008.4484333
Title: Silicon beam structures comprising nanophotonics as NEMS sensors
Authors: Lee, C. 
Thillaigovindan, J.
Radhakrishnan, R.
Li, J.
Balasubramanian, N.
Keywords: MEMS
Nanophotonics
NEMS
Sensors
Issue Date: 2008
Source: Lee, C.,Thillaigovindan, J.,Radhakrishnan, R.,Li, J.,Balasubramanian, N. (2008). Silicon beam structures comprising nanophotonics as NEMS sensors. 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS : 270-273. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2008.4484333
Abstract: We present design and simulation results of a NEMS (Nanoelectromechanical system) based mechanical sensor using a silicon suspended-beam comprising two-dimensional (2-D) photonic crystal (PhC) microcavity structure. A silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide. Various kinds of micro-cavity within the line defect are added as resonant band gap structure to form a PhC waveguide (PhCWG) based optical filter with sharp resonant peak. Since the resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the micro-cavity. Results of resonant wavelength shift regarding to deformation or force loading on the suspended PhCWG beam are calculated. Thus deformation and force loads can be detected in terms of resonant wavelength shift. © 2008 IEEE.
Source Title: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
URI: http://scholarbank.nus.edu.sg/handle/10635/71770
ISBN: 9781424419081
DOI: 10.1109/NEMS.2008.4484333
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