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|Title:||Precision motion control system for ultra-precision semiconductor and electon components manufacturing|
|Authors:||Tan, K.K. |
|Source:||Tan, K.K.,Dou, H.F.,Tang, K.Z. (2001). Precision motion control system for ultra-precision semiconductor and electon components manufacturing. Proceedings - Electronic Components and Technology Conference : 1372-1379. ScholarBank@NUS Repository.|
|Abstract:||In this paper, the development of a motion control system for ultra-precision semiconductor and electronic components manufacturing is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface and all constituent control components will be elaborated on in the paper.|
|Source Title:||Proceedings - Electronic Components and Technology Conference|
|Appears in Collections:||Staff Publications|
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