Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/71489
Title: Precision motion control system for ultra-precision semiconductor and electon components manufacturing
Authors: Tan, K.K. 
Dou, H.F. 
Tang, K.Z. 
Issue Date: 2001
Source: Tan, K.K.,Dou, H.F.,Tang, K.Z. (2001). Precision motion control system for ultra-precision semiconductor and electon components manufacturing. Proceedings - Electronic Components and Technology Conference : 1372-1379. ScholarBank@NUS Repository.
Abstract: In this paper, the development of a motion control system for ultra-precision semiconductor and electronic components manufacturing is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface and all constituent control components will be elaborated on in the paper.
Source Title: Proceedings - Electronic Components and Technology Conference
URI: http://scholarbank.nus.edu.sg/handle/10635/71489
ISSN: 05695503
Appears in Collections:Staff Publications

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