Precision motion control system for ultra-precision semiconductor and electon components manufacturing

Abstract

In this paper, the development of a motion control system for ultra-precision semiconductor and electronic components manufacturing is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface and all constituent control components will be elaborated on in the paper.