Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/70936
| Title: | Microwave coplanar filters on Si substrates | Authors: | Chan, K.T. Chin, A. Kuo, J.T. Chang, C.Y. Duh, D.S. Lin, W.J. Zhu, C. Li, M.F. Kwong, D.-L. |
Issue Date: | 2003 | Citation: | Chan, K.T.,Chin, A.,Kuo, J.T.,Chang, C.Y.,Duh, D.S.,Lin, W.J.,Zhu, C.,Li, M.F.,Kwong, D.-L. (2003). Microwave coplanar filters on Si substrates. IEEE MTT-S International Microwave Symposium Digest 3 : 1909-1912. ScholarBank@NUS Repository. | Abstract: | The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter. | Source Title: | IEEE MTT-S International Microwave Symposium Digest | URI: | http://scholarbank.nus.edu.sg/handle/10635/70936 | ISSN: | 0149645X |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.