Laser microprocessing and the applications in microelectronics industry
Lu, Y.F. Ren, Z.M.
Ren, Z.M.
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Abstract
Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation.
Keywords
Laser bumping, Laser cleaning, Laser microprocessing, Laser nanoprocessing, Laser texturing
Source Title
Proceedings of SPIE - The International Society for Optical Engineering
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Series/Report No.
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Date
2001
DOI
10.1117/12.413755
Type
Conference Paper