Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.413755
Title: Laser microprocessing and the applications in microelectronics industry
Authors: Lu, Y.F. 
Ren, Z.M.
Keywords: Laser bumping
Laser cleaning
Laser microprocessing
Laser nanoprocessing
Laser texturing
Issue Date: 2001
Source: Lu, Y.F., Ren, Z.M. (2001). Laser microprocessing and the applications in microelectronics industry. Proceedings of SPIE - The International Society for Optical Engineering 4157 : 191-199. ScholarBank@NUS Repository. https://doi.org/10.1117/12.413755
Abstract: Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/70762
ISSN: 0277786X
DOI: 10.1117/12.413755
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