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|Title:||Laser microprocessing and the applications in microelectronics industry||Authors:||Lu, Y.F.
|Issue Date:||2001||Citation:||Lu, Y.F., Ren, Z.M. (2001). Laser microprocessing and the applications in microelectronics industry. Proceedings of SPIE - The International Society for Optical Engineering 4157 : 191-199. ScholarBank@NUS Repository. https://doi.org/10.1117/12.413755||Abstract:||Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation.||Source Title:||Proceedings of SPIE - The International Society for Optical Engineering||URI:||http://scholarbank.nus.edu.sg/handle/10635/70762||ISSN:||0277786X||DOI:||10.1117/12.413755|
|Appears in Collections:||Staff Publications|
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