Experimental evaluation of multiplexed MPC for semiconductor manufacturing

Abstract

A variant of Model Predictive Control (MPC), called Multiplexed MPC (MMPC) has been proposed recently. The motivation for MMPC is to reduce real-time computational load. The reduction in computational load can be used gainfully to increase sampling rate and improve performance. In design, selecting a suitable sampling interval taking into account the computing resources available is a key consideration. It is well-known that faster sampling increases computational load but gives better performance. In this paper, we carried out experiments at various samplng intervals to investigate the improvement in the cost function of the MMPC design. Experiment and simulation results were matched and hence before hardware implementation, design can be performed with the aid of simulation. ©2009 ACA.