Please use this identifier to cite or link to this item: https://doi.org/10.1109/DSR.2011.6026876
Title: Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate
Authors: Wang, N.
Tsai, J.M.
Soon, B.W.
Kwong, D.-L.
Hsiao, F.-L. 
Palaniapan, M. 
Lee, C. 
Keywords: Bloch-mode
CMOS compatible
phononic crystal
resonator
Issue Date: 2011
Source: Wang, N.,Tsai, J.M.,Soon, B.W.,Kwong, D.-L.,Hsiao, F.-L.,Palaniapan, M.,Lee, C. (2011). Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. 2011 Defense Science Research Conference and Expo, DSR 2011 : -. ScholarBank@NUS Repository. https://doi.org/10.1109/DSR.2011.6026876
Abstract: This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications. © 2011 IEEE.
Source Title: 2011 Defense Science Research Conference and Expo, DSR 2011
URI: http://scholarbank.nus.edu.sg/handle/10635/70246
ISBN: 9781424492763
DOI: 10.1109/DSR.2011.6026876
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