Experimental characterisation and modelling of on-chip capacitors and resistors on GaAs substrates

Abstract

Experimental characterisation of various on-chip capacitors and resistors on GaAs subsrates is performed, and these capacitor and resistor samples are tested up to 20 GHz using a Cascade 9000™ analytical RF probe station combined with a de-embedding technique. To accurately extract these passive device parameters, equivalent circuit models are presented for the capacitor and resistor. Excellent agreement is achieved between the measured and simulated data. The chosen circuit models depend on the layout and fabrication technology, and capacitor and resistor geometries.