Please use this identifier to cite or link to this item:
https://doi.org/10.1109/IEDM.2010.5703340
| Title: | Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement | Authors: | Liu, X. Liu, B. Low, E.K.F. Chin, H.-C. Liu, W. Yang, M. Tan, L.S. Yeo, Y.-C. |
Issue Date: | 2010 | Citation: | Liu, X.,Liu, B.,Low, E.K.F.,Chin, H.-C.,Liu, W.,Yang, M.,Tan, L.S.,Yeo, Y.-C. (2010). Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement. Technical Digest - International Electron Devices Meeting, IEDM : 11.3.1-11.3.4. ScholarBank@NUS Repository. https://doi.org/10.1109/IEDM.2010.5703340 | Source Title: | Technical Digest - International Electron Devices Meeting, IEDM | URI: | http://scholarbank.nus.edu.sg/handle/10635/69936 | ISBN: | 9781424474196 | ISSN: | 01631918 | DOI: | 10.1109/IEDM.2010.5703340 |
| Appears in Collections: | Staff Publications |
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