Please use this identifier to cite or link to this item: https://doi.org/10.1109/IEDM.2010.5703340
Title: Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
Authors: Liu, X.
Liu, B.
Low, E.K.F.
Chin, H.-C.
Liu, W.
Yang, M.
Tan, L.S. 
Yeo, Y.-C. 
Issue Date: 2010
Source: Liu, X.,Liu, B.,Low, E.K.F.,Chin, H.-C.,Liu, W.,Yang, M.,Tan, L.S.,Yeo, Y.-C. (2010). Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement. Technical Digest - International Electron Devices Meeting, IEDM : 11.3.1-11.3.4. ScholarBank@NUS Repository. https://doi.org/10.1109/IEDM.2010.5703340
Source Title: Technical Digest - International Electron Devices Meeting, IEDM
URI: http://scholarbank.nus.edu.sg/handle/10635/69936
ISBN: 9781424474196
ISSN: 01631918
DOI: 10.1109/IEDM.2010.5703340
Appears in Collections:Staff Publications

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