Please use this identifier to cite or link to this item: https://doi.org/10.1109/ICSET.2008.4747067
Title: Design and modeling of vacuum packaged MEMS thermoelectric power generator using heat dissipation path
Authors: Xie, J.
Lee, C. 
Keywords: Energy harvester
MEMS
Power generator
Thermoelectric
Issue Date: 2008
Source: Xie, J., Lee, C. (2008). Design and modeling of vacuum packaged MEMS thermoelectric power generator using heat dissipation path. 2008 IEEE International Conference on Sustainable Energy Technologies, ICSET 2008 : 542-545. ScholarBank@NUS Repository. https://doi.org/10.1109/ICSET.2008.4747067
Abstract: A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 μW/cm2 for temperature difference of 6°C between two ends of thermocouple junctions. It shows that the proposed device concept is an effective and low cost approach to enhance the output voltage. © 2008 IEEE.
Source Title: 2008 IEEE International Conference on Sustainable Energy Technologies, ICSET 2008
URI: http://scholarbank.nus.edu.sg/handle/10635/69841
ISBN: 9781424418886
DOI: 10.1109/ICSET.2008.4747067
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