Please use this identifier to cite or link to this item: https://doi.org/10.1109/EDSSC.2007.4450123
Title: Design and modeling of nanomechanical sensors using silicon 2-D photonic crystals
Authors: Lee, C. 
Thillaigovindan, J.
Radhakrishnan, R.
Issue Date: 2007
Source: Lee, C.,Thillaigovindan, J.,Radhakrishnan, R. (2007). Design and modeling of nanomechanical sensors using silicon 2-D photonic crystals. IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 : 305-308. ScholarBank@NUS Repository. https://doi.org/10.1109/EDSSC.2007.4450123
Abstract: We present design and simulation results of a NEMS (Nanoelectromechanical system) based mechanical sensor using a silicon suspended-beam comprising two-dimensional (2-D) photonic crystal (PhC) microcavity structure. A silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide. The resonant band gap structure is added into a PhC waveguide and leads to sharp resonant peak in output spectrum. Since the resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the micro-cavity. Results of resonant wavelength shift regarding to deformation or force loading on the suspended PhC waveguide beam are calculated. Thus deformation and force loads can be detected in terms of resonant wavelength shift. © 2007 IEEE.
Source Title: IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
URI: http://scholarbank.nus.edu.sg/handle/10635/69839
ISBN: 1424406374
DOI: 10.1109/EDSSC.2007.4450123
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