Please use this identifier to cite or link to this item: https://doi.org/10.1166/nnl.2011.1160
Title: Design and characterization of microelectromechanical system flow sensors using silicon nanowires
Authors: Lou, L.
Lee, C. 
Xu, X.
Kotlanka, R.K.
Shao, L.
Park, W.-T.
Kwong, D.L.
Keywords: Flow sensor
MEMS
Silicon nanowire
Issue Date: Apr-2011
Source: Lou, L., Lee, C., Xu, X., Kotlanka, R.K., Shao, L., Park, W.-T., Kwong, D.L. (2011-04). Design and characterization of microelectromechanical system flow sensors using silicon nanowires. Nanoscience and Nanotechnology Letters 3 (2) : 230-234. ScholarBank@NUS Repository. https://doi.org/10.1166/nnl.2011.1160
Abstract: Cantilever structures were reported to be used for flow sensing purposes. Herein, we present silicon nanowire (SiNW) based cantilever flow sensor. Five cantilever flow sensors with different depths are modeled and simulated (fluid-structure) with water flow velocity from 50 cm/s to 200 cm/s. SiNW is embedded in the cantilever as piezoresistive transducer at the anchor, and a maximum resistance change of 11.2% is obtained. Based on the results, increasing depth will not only contributes to larger cantilever deformation at fixed flow velocity, but also improves its sensitivity. However when the depth become larger to certain degree, this effect tends to saturate. Copyright © 2011 American Scientific Publishers.
Source Title: Nanoscience and Nanotechnology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/69821
ISSN: 19414900
DOI: 10.1166/nnl.2011.1160
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