Please use this identifier to cite or link to this item: https://doi.org/10.1109/ESCINANO.2010.5700956
Title: Dependence of substrate orientation and etching conditions on the formation of Si nanowires
Authors: Theng, T.L.
Hui, H.M.
Sheng, C.T.
Soon, O.C.
Sun, M.T.
Qixun, W.
Beng, S.C.
Jin, C.S. 
Issue Date: 2010
Source: Theng, T.L.,Hui, H.M.,Sheng, C.T.,Soon, O.C.,Sun, M.T.,Qixun, W.,Beng, S.C.,Jin, C.S. (2010). Dependence of substrate orientation and etching conditions on the formation of Si nanowires. 2010 International Conference on Enabling Science and Nanotechnology, ESciNano 2010 - Proceedings : -. ScholarBank@NUS Repository. https://doi.org/10.1109/ESCINANO.2010.5700956
Abstract: Silicon nanowires (SiNWs) have received great interest because of their excellent electrical, mechanical, and optical properties as well as their potential applications, ranging from nano/micro-electromechanical system to optoelectronics, and biological/chemical sensors [1-2]. One of the common methods to synthesize Si nanowire arrays directly from bulk silicon wafers is through electroless etching. However the difficulties faced in this method are achieving good control over the distribution and size of the nanowires. ©2010 IEEE.
Source Title: 2010 International Conference on Enabling Science and Nanotechnology, ESciNano 2010 - Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/69809
ISBN: 9781424488544
DOI: 10.1109/ESCINANO.2010.5700956
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