DC-coupled laser induced detection system for fault localization in microelectronic failure analysis

Please use this identifier to cite or link to this item: https://doi.org/10.1109/IPFA.2006.250981

Title:	DC-coupled laser induced detection system for fault localization in microelectronic failure analysis
Authors:	Quah, A.C.T. Koh, L.S. Chua, C.M. Palaniappan, M. Chin, J.M. Phang, J.C.H.
Issue Date:	2006
Citation:	Quah, A.C.T.,Koh, L.S.,Chua, C.M.,Palaniappan, M.,Chin, J.M.,Phang, J.C.H. (2006). DC-coupled laser induced detection system for fault localization in microelectronic failure analysis. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 327-332. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2006.250981
Abstract:	This paper describes a new dc-coupled laser induced detection system for fault localization in microelectronic failure analysis. This method removes artifacts inherent in ac-coupled detection systems and is capable of producing an accurate mapping of the laser induced resistance change of the devices without signal attenuation. This method is also capable of localizing large area faults without signal distortion. © 2006 IEEE.
Source Title:	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
URI:	http://scholarbank.nus.edu.sg/handle/10635/69780
ISBN:	1424402069
DOI:	10.1109/IPFA.2006.250981
Appears in Collections:	Staff Publications

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