Please use this identifier to cite or link to this item: https://doi.org/10.1361/cp2008istfa402
Title: Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors
Authors: Quah, A.C.T.
Goh, S.H.
Ravikumar, V.K.
Phoa, S.L.
Narang, V.
Chin, J.M.
Chua, C.M.
Phang, J.C.H. 
Issue Date: 2008
Source: Quah, A.C.T., Goh, S.H., Ravikumar, V.K., Phoa, S.L., Narang, V., Chin, J.M., Chua, C.M., Phang, J.C.H. (2008). Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 402-406. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa402
Abstract: The spatial resolution and sensitivity of laser induced techniques are significantly enhanced by combining refractive solid immersion lens technology and laser pulsing with lock-in detection algorithm. Laser pulsing and lock-in detection enhances the detection sensitivity and removes the 'tail' artifacts due to amplifier ac-coupling response. Three case studies on microprocessor devices with different failure modes are presented to show that the enhancements made a difference between successful and unsuccessful defect localization. Copyright © 2008 ASM International..
Source Title: Conference Proceedings from the International Symposium for Testing and Failure Analysis
URI: http://scholarbank.nus.edu.sg/handle/10635/69636
ISBN: 9780871707147
DOI: 10.1361/cp2008istfa402
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