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|Title:||Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors|
|Citation:||Quah, A.C.T., Goh, S.H., Ravikumar, V.K., Phoa, S.L., Narang, V., Chin, J.M., Chua, C.M., Phang, J.C.H. (2008). Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 402-406. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa402|
|Abstract:||The spatial resolution and sensitivity of laser induced techniques are significantly enhanced by combining refractive solid immersion lens technology and laser pulsing with lock-in detection algorithm. Laser pulsing and lock-in detection enhances the detection sensitivity and removes the 'tail' artifacts due to amplifier ac-coupling response. Three case studies on microprocessor devices with different failure modes are presented to show that the enhancements made a difference between successful and unsuccessful defect localization. Copyright © 2008 ASM International..|
|Source Title:||Conference Proceedings from the International Symposium for Testing and Failure Analysis|
|Appears in Collections:||Staff Publications|
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