Please use this identifier to cite or link to this item:
|Title:||Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors|
|Citation:||Quah, A.C.T., Goh, S.H., Ravikumar, V.K., Phoa, S.L., Narang, V., Chin, J.M., Chua, C.M., Phang, J.C.H. (2008). Combining refractive solid immersion lens and pulsed laser induced techniques for effective defect localization on microprocessors. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 402-406. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa402|
|Abstract:||The spatial resolution and sensitivity of laser induced techniques are significantly enhanced by combining refractive solid immersion lens technology and laser pulsing with lock-in detection algorithm. Laser pulsing and lock-in detection enhances the detection sensitivity and removes the 'tail' artifacts due to amplifier ac-coupling response. Three case studies on microprocessor devices with different failure modes are presented to show that the enhancements made a difference between successful and unsuccessful defect localization. Copyright © 2008 ASM International..|
|Source Title:||Conference Proceedings from the International Symposium for Testing and Failure Analysis|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Oct 16, 2018
WEB OF SCIENCETM
checked on Oct 8, 2018
checked on Sep 22, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.