Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-4484/16/4/045
Title: Out-of-plane electrostatic actuation of microcantilevers
Authors: O'Shea, S.J.
Lu, P.
Shen, F. 
Neuzil, P.
Zhang, Q.X.
Issue Date: Apr-2005
Citation: O'Shea, S.J., Lu, P., Shen, F., Neuzil, P., Zhang, Q.X. (2005-04). Out-of-plane electrostatic actuation of microcantilevers. Nanotechnology 16 (4) : 602-608. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/16/4/045
Abstract: An electrostatic actuation method to generate useful out-of-plane motion of a cantilever structure is described. The critical design feature is to create an asymmetric electric field such that an electrostatic force is generated in a direction perpendicular to the wafer surface. The technical application of the actuation method is to large arrays of microfabricated sensors such as cantilevers and in particular to resonator type sensors. The design approach also overcomes several problems associated with exposure of microfabricated cantilever structures to fluid environments, either during processing or during application of such devices as bio-sensors, e.g. stiction, condensation, squeeze damping, exposure to a biological sample, cleaning and biological activation treatments of the cantilever surfaces. The viability of the technique is demonstrated using microfabricated silicon cantilevers utilizing both optical and piezoresistive detection of the cantilever displacement. © 2005 IOP Publishing Ltd.
Source Title: Nanotechnology
URI: http://scholarbank.nus.edu.sg/handle/10635/67209
ISSN: 09574484
DOI: 10.1088/0957-4484/16/4/045
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