Please use this identifier to cite or link to this item:
Title: Out-of-plane electrostatic actuation of microcantilevers
Authors: O'Shea, S.J.
Lu, P.
Shen, F. 
Neuzil, P.
Zhang, Q.X.
Issue Date: Apr-2005
Citation: O'Shea, S.J., Lu, P., Shen, F., Neuzil, P., Zhang, Q.X. (2005-04). Out-of-plane electrostatic actuation of microcantilevers. Nanotechnology 16 (4) : 602-608. ScholarBank@NUS Repository.
Abstract: An electrostatic actuation method to generate useful out-of-plane motion of a cantilever structure is described. The critical design feature is to create an asymmetric electric field such that an electrostatic force is generated in a direction perpendicular to the wafer surface. The technical application of the actuation method is to large arrays of microfabricated sensors such as cantilevers and in particular to resonator type sensors. The design approach also overcomes several problems associated with exposure of microfabricated cantilever structures to fluid environments, either during processing or during application of such devices as bio-sensors, e.g. stiction, condensation, squeeze damping, exposure to a biological sample, cleaning and biological activation treatments of the cantilever surfaces. The viability of the technique is demonstrated using microfabricated silicon cantilevers utilizing both optical and piezoresistive detection of the cantilever displacement. © 2005 IOP Publishing Ltd.
Source Title: Nanotechnology
ISSN: 09574484
DOI: 10.1088/0957-4484/16/4/045
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Mar 23, 2019


checked on Mar 13, 2019

Page view(s)

checked on Jan 26, 2019

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.