Please use this identifier to cite or link to this item: https://doi.org/10.1049/el.2010.0493
Title: Large rotation angle micromirror based on hypocycloidal electrothermal actuators
Authors: Xu, Y.
Singh, J.
Chen, N. 
Issue Date: 13-May-2010
Source: Xu, Y., Singh, J., Chen, N. (2010-05-13). Large rotation angle micromirror based on hypocycloidal electrothermal actuators. Electronics Letters 46 (10) : 704-706. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2010.0493
Abstract: A large rotation angle micromirror using hypocycloidal electrothermal actuators (HEAs) is presented. The mechanical rotation angle of the micromirror is ∼35° at 2.6V in nonresonant mode. The Cr/Au coated square mirror plate is supported by two groups of HEAs in order to achieve single axis rotation. Four Al/Si bimorph structures are staggerly connected in parallel to form a HEA. This structure is experimentally demonstrated to increase the deflection angle. Moreover, the rotation axis keeps still and there is no lateral shifting effect. The -3dB cutoff frequency was found to be about 29Hz as the large signal frequency response. © 2010 The Institution of Engineering and Technology.
Source Title: Electronics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/67135
ISSN: 00135194
DOI: 10.1049/el.2010.0493
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