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|Title:||Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly|
|Citation:||Xu, Y., Singh, J., Premachandran, C.S., Khairyanto, A., Chen, K.W.S., Chen, N., Sheppard, C.J.R., Olivo, M. (2008-12-01). Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly. Journal of Micromechanics and Microengineering 18 (12) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/12/125005|
|Abstract:||A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index (GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17°. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than 4 mm and the length of its rigid part is about 25 mm. The probe engineering and proof of concept of the probe were demonstrated by obtaining en face and three-dimensional OCT images of an IR card used as a standard sample. © 2008 IOP Publishing Ltd.|
|Source Title:||Journal of Micromechanics and Microengineering|
|Appears in Collections:||Staff Publications|
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