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|Title:||Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates|
|Citation:||Vicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H. (2007). Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates. Applied Physics Letters 90 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2642619|
|Abstract:||In this study, the authors report on the fabrication processes to realize the freestanding ZnO micromechanical structures on Si(111) substrates. Arrays of freestanding cantilevers and microbridges have been fabricated using a combination of dry etching techniques. The mechanical properties of the released ZnO structures are characterized by micro-Raman spectroscopy. The residual stress in these freestanding micromechanical structures is determined from the E2 (2) phonon peak shift. Such a method to realize the freestanding structures on Si platform would be useful for the fabrication of ZnO-based microelectromechanical systems and sensors. © 2007 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
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