Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62876
Title: Three-dimensional analysis of locally deposited silicon oxide on ferrite by a combination of microprobe RBS and PIXE
Authors: Kinomura, A.
Horino, Y.
Mokuno, Y.
Chayahara, A.
Kiuchi, M.
Fujii, K.
Takai, M.
Lu, Y.-F. 
Issue Date: 2-Mar-1994
Source: Kinomura, A.,Horino, Y.,Mokuno, Y.,Chayahara, A.,Kiuchi, M.,Fujii, K.,Takai, M.,Lu, Y.-F. (1994-03-02). Three-dimensional analysis of locally deposited silicon oxide on ferrite by a combination of microprobe RBS and PIXE. Nuclear Inst. and Methods in Physics Research, B 85 (1-4) : 689-692. ScholarBank@NUS Repository.
Abstract: Silicon oxide layers locally deposited on ferrite were analyzed by microprobe RBS and PIXE with 1.5 MeV protons. Surface distribution of the deposited lines was found to be uniform by an RBS-mapping image in spite of a nonuniform image in a secondary-electron measurement. A thickness of the deposited layer could be nondestructively estimated by a combination of RBS and PIXE mapping images. © 1994.
Source Title: Nuclear Inst. and Methods in Physics Research, B
URI: http://scholarbank.nus.edu.sg/handle/10635/62876
ISSN: 0168583X
Appears in Collections:Staff Publications

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