Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62398
Title: Magnetic axial field measurements on a high resolution miniature scanning electron microscope
Authors: Khursheed, A. 
Issue Date: Apr-2000
Source: Khursheed, A. (2000-04). Magnetic axial field measurements on a high resolution miniature scanning electron microscope. Review of Scientific Instruments 71 (4) : 1712-1715. ScholarBank@NUS Repository.
Abstract: This article presents magnetic axial field measurements for a high resolution miniature scanning electron microscope (SEM). The experimental results correlate well with simulation predictions. The SEM has a total height of less than 55 mm. Based upon measured axial field distributions, the on-axis spherical and chromatic aberration coefficients for a 1 keV primary beam are predicted to be 0.36 and 0.6 mm, respectively, for a working distance of 7.5 mm. These aberrations are an order of magnitude smaller than those for conventional SEMs with comparable working distance conditions. The SEM design uses an in-specimen chamber permanent magnet objective lens that lies outside vacuum and can easily be replaced. © 2000 American Institute of Physics.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/62398
ISSN: 00346748
Appears in Collections:Staff Publications

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