Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62372
Title: Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
Authors: Lu, Yong-Feng 
Aoyagi, Yoshinobu
Issue Date: 1994
Source: Lu, Yong-Feng,Aoyagi, Yoshinobu (1994). Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents. Japanese Journal of Applied Physics, Part 2: Letters 33 (3 B) : L430-L433. ScholarBank@NUS Repository.
Abstract: Surface contaminations are removed by laser irradiation with pulse output and short wavelength. It is a new dry cleaning process to remove surface organic contaminations without using ultrasonic cleaning with carbon fluorochloride (CFC) and other organic solvents. This provides a new dry process to clean different substrate surfaces and can take the place of conventional wet cleaning processes such as ultrasonic cleaning with CFC and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of laser pulse.
Source Title: Japanese Journal of Applied Physics, Part 2: Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/62372
ISSN: 00214922
Appears in Collections:Staff Publications

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