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https://doi.org/10.1088/0957-0233/10/11/316
Title: | Improving the speed of scanning electron microscope deflection systems | Authors: | Lee, K.W. Thong, J.T.L. |
Keywords: | Electromagnetic deflection Scanning electron microscope |
Issue Date: | Nov-1999 | Citation: | Lee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/10/11/316 | Abstract: | A simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ∼6 μs to ∼0.5 μs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection. | Source Title: | Measurement Science and Technology | URI: | http://scholarbank.nus.edu.sg/handle/10635/62326 | ISSN: | 09570233 | DOI: | 10.1088/0957-0233/10/11/316 |
Appears in Collections: | Staff Publications |
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