Please use this identifier to cite or link to this item: https://doi.org/10.1016/0038-1101(90)90192-H
Title: Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
Authors: Choo, S.C. 
Leong, M.S. 
Liem, C.B.T.
Kong, K.C.
Issue Date: 1990
Source: Choo, S.C., Leong, M.S., Liem, C.B.T., Kong, K.C. (1990). Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem. Solid-State Electronics 33 (6) : 783-791. ScholarBank@NUS Repository. https://doi.org/10.1016/0038-1101(90)90192-H
Abstract: The traditional method of solving, on a layer-by-layer basis, the inverse problem of extracting resistivity vaues from spreading resistance measurements is found to produce wildly oscillatory, physically unacceptable resistivity profiles in the case of p-type silicon structures, where a resistivity-dependent probe contact radius is used in conjunction with the probe calibration data. These oscillations are manifestations of the fact that the inverse problem has non-unique solutions; they occur because the problem is inherently ill-posed. The well-known Tikhonov regularisation technique, which converts the present set of highly non-linear integral equations to an equivalent variational problem, is applied to stabilise the solution. Tests are performed on a variety of simulated profiles, and they reveal the existence of an optimum value for the regularisation parameter that is to be used with a second difference expression for the stabiliser of the cost function. When applied to measured spreading resistance data, the technique is found to produce results of reconstruction that are stable and physically reasonable.
Source Title: Solid-State Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/62175
ISSN: 00381101
DOI: 10.1016/0038-1101(90)90192-H
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

8
checked on Dec 6, 2017

WEB OF SCIENCETM
Citations

13
checked on Nov 18, 2017

Page view(s)

21
checked on Dec 10, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.