Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62167
Title: Experimental investigation into the use of micro-extraction fields for electron beam testing
Authors: Khursheed, A. 
Goh, S.P.
Keywords: Electron beam test
Micro-extraction fields
Transverse local field effects
Voltage contrast
Issue Date: Sep-1997
Source: Khursheed, A.,Goh, S.P. (1997-09). Experimental investigation into the use of micro-extraction fields for electron beam testing. Microelectronic Engineering 34 (2) : 171-185. ScholarBank@NUS Repository.
Abstract: In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a 1-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that is of the same size as the structures to be probed. This paper describes an experimental investigation made into several types of micro-extraction layouts, and shows that they can be used to provide reliable voltage contrast measurements.
Source Title: Microelectronic Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/62167
ISSN: 01679317
Appears in Collections:Staff Publications

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