Please use this identifier to cite or link to this item: https://doi.org/10.1016/0038-1101(92)90168-C
Title: Contact resistivity measurement using four circular contacts
Authors: Chua, S.J. 
Lee, S.H.
Issue Date: 1992
Citation: Chua, S.J., Lee, S.H. (1992). Contact resistivity measurement using four circular contacts. Solid-State Electronics 35 (9) : 1331-1335. ScholarBank@NUS Repository. https://doi.org/10.1016/0038-1101(92)90168-C
Abstract: In this paper, a simple technique for measuring contact resistivity of metallization is proposed. It makes use of four circular contacts, a structure which is simple to fabricate and requires only two measurement steps to obtain the contact resistivity. This technique is suitable for process monitoring of contact resistivity in large-scale production where simplicity in fabricating the test structure and in measurement is a necessity.
Source Title: Solid-State Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/61967
ISSN: 00381101
DOI: 10.1016/0038-1101(92)90168-C
Appears in Collections:Staff Publications

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