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|Title:||Contact resistivity measurement using four circular contacts|
|Authors:||Chua, S.J. |
|Source:||Chua, S.J., Lee, S.H. (1992). Contact resistivity measurement using four circular contacts. Solid-State Electronics 35 (9) : 1331-1335. ScholarBank@NUS Repository. https://doi.org/10.1016/0038-1101(92)90168-C|
|Abstract:||In this paper, a simple technique for measuring contact resistivity of metallization is proposed. It makes use of four circular contacts, a structure which is simple to fabricate and requires only two measurement steps to obtain the contact resistivity. This technique is suitable for process monitoring of contact resistivity in large-scale production where simplicity in fabricating the test structure and in measurement is a necessity.|
|Source Title:||Solid-State Electronics|
|Appears in Collections:||Staff Publications|
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