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Title: Stabilization of dual-axis micromirrors beyond the pull-in point by integral sliding mode control
Authors: Zhao, Y.
Tay, F.E.H. 
Chau, F.S. 
Zhou, G. 
Issue Date: 1-Jul-2006
Citation: Zhao, Y., Tay, F.E.H., Chau, F.S., Zhou, G. (2006-07-01). Stabilization of dual-axis micromirrors beyond the pull-in point by integral sliding mode control. Journal of Micromechanics and Microengineering 16 (7) : 1242-1250. ScholarBank@NUS Repository.
Abstract: Electrostatically actuated dual-axis micromirrors suffer from inherently nonlinear electrostatic torques, leading to the problem of 'pull-in' for large tilt angles. Stabilization beyond the pull-in angles of this device poses a great challenge for researchers. This paper presents a servo mechanism based on integral sliding mode control (ISMC) for this purpose. The control scheme comprises an integrator controller which is designed to achieve zero steady-state error, and a sliding mode controller which is designed for overcoming the instability. The effectiveness of the closed-loop system is illustrated by simulation and verified by experimental results. Both of them show that the dual-axis micromirror can be stabilized beyond the pull-in point with the proposed approach. © 2006 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
ISSN: 09601317
DOI: 10.1088/0960-1317/16/7/018
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